Electrostatic chuck

A chuck is a specialized type of clamp used to hold an object with radial symmetry, especially a cylinder. In drills and mills it holds the rotating. SHINKO designs ceramic electrostatic chucks which are widely used for wafer processing (etching, CVD), LCD processing etc.

In an electrostatic chuck of the type wherein an electrode is covered by an insulating dielectric member, an object, typically a semiconductor wafer, to be. This device is extremely useful for R.

The electrostatic chuck is able to clamp multiple chips as well as parts of a wafer to the wafer holder by electrostatic force. Also, mask flattening is possible if chucking forces are sufficiently high and the chuck is flat and stiff. In fact, flatness is probably the most demanding parameter. With the huge investment in the semiconductor industry, we are optimistic about the future of the electrostatic chuck industry. LTD and various fine ceramics products and piezoelectric products.

The basic design of an electrostatic chuck closely resembles that of a parallel plate capacitor, with the wafer being used as one of the plates. Since classical physics,.

Visit our web site to find. FM Industries employs a dedicated RD and engineering staff that is committed to providing each. Semiconductor substrates such as Si wafers or masks for the next generation of extreme ultraviolet lithography (EUVL) are handled in a vacuum. Electrostatics is a branch of physics that studies electric charges at rest. Essentially the same electrostatic pressure value as with a unipolar chuck can be obtained.

The schema is shown in FIGURE 2. Features Electro-static chucks are made of bulk ceramics and have high resistance to plasma and process gas. The built-in heater ensures high in-plane temperature. KMAX-Tech is leading esc chuck manufacturer in Taiwan that specialist in the precision machinery and technology such as electrostatic chuck , etc.

Calitech developed optimal E- Chuck (ESC) solutions for various applications. In addition to applications for semiconductor industry, we also. SpellmanHV ESC Series of electrostatic chuck power supplies provide clean and accurate voltages required for electrostatic chuck wafer processing applications. Adhesional mechanism of electrostatic inductive fibers.

Xicon provides high quality electrostatic chuck used in HITACHI, LAM,TEL,AMAT,SEMCO etch and CVD systems refurbishing , rebuilding and redesigning services,this. We accept major credit cards,paypal! Our selection of industry specific magazines cover a large range of topics.

Production and sale of various fine ceramics products and piezoelectric products. ANALYSIS OF COULOMB AND JOHNSEN-RAHBEK ELECTROSTATIC CHUCK PERFORMANCE FOR EUV LITHOGRAPHY Michael R. An electrostatic chuck for a plasma reactor apparatus comprises a base metallic section 2 a pair of electrodes set in bonding material and. A device expected to be potentially less expensive and more effective than any on the market in helping cool silicon wafers during the chip manufacturing process has.

They em-ploy a electrostatic field to clamp the. The body of the retention spring clip has a “C”-shaped cross-section. High voltage power supply, X-ray generators, X-ray Inspection System, NDT. Find great deals on eBay for electrostatic chuck.

Generally, a Johnsen-Rahbek (J-R) type electrostatic chuck (ESC) generates higher attractive force than a Coulomb type ESC. Attractive force in a J-R type ESC is. Our products are most effective sold not only during the Chinese. Download as PDF File (.pdf), Text File (.txt) or read online.

Global electrostatic chucks market is expected to reach USD412.